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COMSOL Inc 6.1 finite element analysis simulation tool
6.1 Finite Element Analysis Simulation Tool, supplied by COMSOL Inc, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/6%2E1+finite+element+analysis+simulation+tool/pm37763952-157-16-15?v=COMSOL+Inc
Average 90 stars, based on 1 article reviews
6.1 finite element analysis simulation tool - by Bioz Stars, 2026-07
90/100 stars

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90
COMSOL Inc 6.1 finite element analysis simulation tool
6.1 Finite Element Analysis Simulation Tool, supplied by COMSOL Inc, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/6%2E1+finite+element+analysis+simulation+tool/pm37763952-157-16-15?v=COMSOL+Inc
Average 90 stars, based on 1 article reviews
6.1 finite element analysis simulation tool - by Bioz Stars, 2026-07
90/100 stars
  Buy from Supplier

90
COMSOL Inc 6.1 finite element analysis (fea) simulation tool
<t>Finite</t> <t>element</t> <t>analysis</t> results of ( a ) horizontal and ( b ) diagonal movement under ±20 V applied voltage on the piezo actuators.
6.1 Finite Element Analysis (Fea) Simulation Tool, supplied by COMSOL Inc, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/6%2E1+finite+element+analysis+simulation+tool/pmc10535209-90-12-11?v=COMSOL+Inc
Average 90 stars, based on 1 article reviews
6.1 finite element analysis (fea) simulation tool - by Bioz Stars, 2026-07
90/100 stars
  Buy from Supplier

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Finite element analysis results of ( a ) horizontal and ( b ) diagonal movement under ±20 V applied voltage on the piezo actuators.

Journal: Micromachines

Article Title: Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies

doi: 10.3390/mi14091789

Figure Lengend Snippet: Finite element analysis results of ( a ) horizontal and ( b ) diagonal movement under ±20 V applied voltage on the piezo actuators.

Article Snippet: presents the moving mechanism of the designed quasi-static MEMS mirror and COMSOL 6.1 finite element analysis (FEA) simulation tool was utilized to analyze the mirror device operations.

Techniques: